Handling: hand and hoist-line implements – Grapple – Load shifting
Patent
1989-06-19
1992-03-03
Spar, Robert J.
Handling: hand and hoist-line implements
Grapple
Load shifting
2941191, 294907, 901 34, 7386204, 7386265, 73777, B25J 1308
Patent
active
050926454
DESCRIPTION:
BRIEF SUMMARY
DESCRIPTION
1. Technical Field
This invention relates to a force detector using resistance elements and its application, and more particularly to a force detector using resistance elements having piezo resistance effect formed on a single crystal substrate and its application.
2. Background Art
Under circumstances where automation of equipment is being developed, an importance has been increasingly attached to the role of sensors. Heretofore, force detectors generally used transform a stress-strain due to a force exerted thereon to a quantity of electricity by means of a strain gauge, etc. to thereby make a detection. Ordinarily, there are many instances where a strain gauge is stuck on a cantilever structure to make a force detection in a specific direction by the stress-strain of the cantilever.
Recently, semiconductor sensors have been devised as a new force and moment sensor. For example, several sensors of this kind are disclosed in the specifications of the Japanese patent applications Nos. 101267/87 to 101270/87. Such semiconductor sensors are suitable for miniaturization and mass production as compared to the sensors using strain gauge and a great demand therefore will be expected in future.
However, these conventional force detectors have the problem that it is difficult to apply them to a wide variety of measurement ranges. The detection range of the force detector may diversely change according to the use purpose. When detections of the load in a range of 0 to 1 Kg and the load in a range of 0 to 100 Kg are taken as an example, individual force detectors therefore must be manufactured, respectively. Accordingly, in the case of application to a wide variety of measurement ranges, mass-productivity and cost performance would be lowered with such conventional force detectors.
Further, the problem with the above-described semiconductor sensor is that the same semiconductor substrate cannot be used for both the force sensor and the moment sensor. Namely, the semiconductor substrate used for a product as the force sensor and the semiconductor substrate used for a product as the moment sensor must be manufactured separately from each other, resulting in the problem of the poor cost performance.
DISCLOSURE OF THE INVENTION
A first object of this invention is to provide a force detector which can be easily applied to a wide variety of measurement ranges.
A second object of this invention is to provide a force/moment detector in which the same substrate can be applied to both the force sensor and the moment sensor.
A third object of this invention is to provide a high precision contact detector by the application of such a force detector as mentioned above.
A fourth object of this invention is to provide a gripper for robot provided with a high precision touch sensor by the application such a force detector as mentioned above.
To achieve the above-described first object, this invention constitutes a force detector comprising: a transducer for transforming a mechanical deformation to an electric signal; a first strain generative body including a supporting portion and a working portion, and connected to the transducer so as to allow the transducer to produce a mechanical deformation on the basis of a displacement relative to the supporting portion of the working portion; and a second strain generative body including a fixed portion fixed to the supporting portion of the first strain generative body with respect to a direction of at least a force to be detected, and a displacement portion connected to the working portion of the first strain generative body, wherein the displacement portion produces a displacement based on a given external force relative to the fixed portion to transmit the displacement produced to the working portion of the first strain generative body.
In the force detector as constructed above, when an external force is applied to the displacement portion, the second strain generative body produces a strain and the displacement portion produces a displacement corresponding to an exter
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"Sensors in Silicon", High Technology, Sep. 1984, pp. 43-50 by Roger Allen.
Eller J.
Spar Robert J.
Wacoh Corporation
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