Robot with dust-free and maintenance-free actuators

Details Robot with dust-free and maintenance-free actuators Robot with dust-free and maintenance-free actuators

1993-02-19

1995-03-14

Underwood, Donald W.

Material or article handling

Horizontally swinging load support

Swinging about pivot

414751, 901 17, 901 23, 310 905, B25J 1804

Patent

active

053972120

ABSTRACT:
A robot with no mechanically contacting components are suitable for use in special environments such as semiconductor manufacturing processes where dust and lubrication are matters of important concern. The robot has a linear actuator composed of magnetic bearings and a linear motor for moving a robot arm linearly without mechanical contact, and a rotary actuator composed of magnetic bearings and a rotary motor for rotating a body which supports the linear actuator, around the rotary actuator without mechanical contact.

REFERENCES:
patent: 3007097 (1961-10-01), Shelley et al.
patent: 4884329 (1989-12-01), Higuchi
patent: 4998859 (1991-03-01), Oshima et al.
patent: 5114302 (1992-05-01), Meisser et al.
patent: 5160877 (1992-11-01), Fujiwara et al.

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