Robot-teaching cassette

Details Robot-teaching cassette Robot-teaching cassette

1993-04-21

1995-08-01

Rosenberger, Richard A.

Optics: measuring and testing

By alignment in lateral direction

G01B 1100

Patent

active

054384184

ABSTRACT:
A robot-teaching cassette is used to teach a robot to position a wafer cassette or a substrate cassette on a cassette-supporting base by the robot, without using the wafer cassette or the substrate cassette. The robot-teaching cassette includes a fixing section capable of being fixed in position on the cassette-supporting base, a moving section capable of being held with a robot-chucking section of the robot and moving separately from the fixing section, a light source provided on the fixing section or the moving section, and a target establishing a reference position, for receiving beams emitted by the light source and provided on the fixing section or the moving section.

REFERENCES:
patent: 5177563 (1993-01-01), Everett et al.

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