Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1983-09-12
1985-10-01
Levy, Stewart J.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
318640, 356375, G01R 1067, G05B 106
Patent
active
045448892
ABSTRACT:
This precision probe uses optical feedback in the X and Y dimensions to locate a microprobe in the airspace over a test pad, and uses pressure feedback in the Z dimension to control Z approach and penetration. The precision probe inspects a target by coarse positioning a guided microprobe to make contact at a selected probe pad. Guidance is optical, by light reflected, from a target by a dual mirror focusing system of concave mirror and flat mirror, to a transducer. Up and down Z positioning of the microprobe is carried out by a shaft positioned by an air diaphragm which is driven to the target by applied air pressure delivered via an air tube, providing the desired penetration of microprobe to microtarget. The probe is retracted by atmospheric pressure. In operation, the microprobe is coarsely positioned by the computer and the coarse positioner in the air space above the X-Y coordinates for the probe pad, but tolerances may be such that the microprobe is not precisely positioned within the airspace periphery of the probe pad. Assuming that the precision required is greater than the tolerances available or desired, fine positioning is required. Fine positioning with guidance sensing, using computer preparation of fine positioning control signals and control signal responsive mechanisms built into the microprobe, accomplishes the fine positioning. Precision X-Y positioning is carried out by the voice coil microactuators, respectively, in response to computer control signals delivered via the control cable.
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IBM Technical Disclosure Bulletin, Beauregard, F., et al., "High-Speed Multiprobe Semiconductor Test Assy.", vol. 8, No. 8, Jan. 1966, p. 1144.
Hendriks Ferdinand
Taylor Russell H.
Baker Stephen M.
International Business Machines - Corporation
Kling Carl C.
Levy Stewart J.
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