Robot prealigner

Details Robot prealigner Robot prealigner

1994-07-12

1995-10-10

Underwood, Donald W.

Material or article handling

Apparatus for charging a load holding or supporting element...

Load holding or supporting element including gripping means

4147446, 4147445, 414749, 414786, 901 6, 901 15, B25J 906

Patent

active

054565618

ABSTRACT:
An alignment station for elements such as semiconductor wafers on a robot arm uses a rotating support and edge detector which in combination are operative to place a wafer on the rotating support, detect wafer alignment, move the wafer to bring it into alignment either on the rotating support itself or onto a separate station.

REFERENCES:
patent: Re30914 (1982-04-01), Chisum
patent: 3694741 (1972-09-01), Abbe
patent: 3706919 (1972-12-01), Abbe
patent: 3771051 (1973-11-01), Abbe
patent: 3775678 (1973-11-01), Abbe
patent: 3775679 (1973-11-01), Abbe
patent: 3805150 (1974-04-01), Abbe
patent: 3812424 (1974-05-01), Abbe
patent: 3815111 (1974-06-01), Abbe
patent: 3958682 (1976-05-01), Martin
patent: 3986109 (1976-10-01), Poduje
patent: 3990005 (1976-11-01), Abbe et al.
patent: 4042161 (1977-08-01), Ando
patent: 4047448 (1977-09-01), Pardo et al.
patent: 4076131 (1978-02-01), Dahlstrom et al.
patent: 4138876 (1979-02-01), Chisum
patent: 4158171 (1979-06-01), Abbe et al.
patent: 4217542 (1980-08-01), Abbe et al.
patent: 4221997 (1980-09-01), Flemming
patent: 4228392 (1980-10-01), Abbe et al.
patent: 4267424 (1981-05-01), Shimatake et al.
patent: 4273504 (1981-06-01), Shimatake et al.
patent: 4300362 (1981-11-01), Lande et al.
patent: 4353029 (1982-10-01), Abbe et al.
patent: 4353677 (1982-10-01), Susnjara et al.
patent: 4356378 (1982-10-01), Cloos et al.
patent: 4383455 (1983-05-01), Tuda et al.
patent: 4392776 (1983-07-01), Shum
patent: 4398720 (1983-08-01), Jones et al.
patent: 4398863 (1983-08-01), Shum
patent: 4399718 (1983-08-01), Zimmer
patent: 4403281 (1983-09-01), Holmes et al.
patent: 4430037 (1984-02-01), Bisiach
patent: 4438309 (1984-03-01), Zimmer
patent: 4455120 (1984-06-01), Richter
patent: 4457664 (1984-07-01), Judell et al.
patent: 4466454 (1984-08-01), Layton
patent: 4479754 (1984-10-01), Inaba et al.
patent: 4483074 (1984-11-01), Rudzyanskas et al.
patent: 4492510 (1985-01-01), Tanii et al.
patent: 4496278 (1985-01-01), Kaise
patent: 4496279 (1985-01-01), Langer
patent: 4503722 (1985-03-01), Suzuki et al.
patent: 4507043 (1985-03-01), Flatau
patent: 4507046 (1985-03-01), Sugimoto et al.
patent: 4507534 (1985-03-01), Kaufmann et al.
patent: 4514136 (1985-04-01), Abe
patent: 4538047 (1985-08-01), Nakano et al.
patent: 4542278 (1985-09-01), Taylor
patent: 4542845 (1985-09-01), Fuse
patent: 4547120 (1985-10-01), Turner, Jr. et al.
patent: 4548097 (1985-10-01), Zimmer
patent: 4552505 (1985-11-01), Gorman
patent: 4555613 (1985-11-01), Shulman
patent: 4556360 (1985-12-01), Hoffman
patent: 4563122 (1986-01-01), Daly et al.
patent: 4574175 (1986-03-01), Javanovic
patent: 4575299 (1986-03-01), Layton et al.
patent: 4576537 (1986-03-01), Inaba et al.
patent: 4585387 (1986-04-01), Jayne
patent: 4586911 (1986-05-01), Murakami
patent: 4592697 (1986-06-01), Tuda et al.
patent: 4593900 (1986-06-01), Burke
patent: 4594049 (1986-06-01), Terauchi
patent: 4601635 (1986-07-01), Ito et al.
patent: 4610598 (1986-09-01), Hamada et al.
patent: 4611749 (1986-09-01), Kawano
patent: 4619575 (1986-10-01), Summa et al.
patent: 4620831 (1986-11-01), Poncet et al.
patent: 4621332 (1986-11-01), Sugimoto et al.
patent: 4624043 (1986-11-01), Bennett
patent: 4624621 (1986-11-01), Murakami et al.
patent: 4626165 (1986-12-01), Nakashima et al.
patent: 4630992 (1986-12-01), Gilli et al.
patent: 4636138 (1987-01-01), Gorman
patent: 4637773 (1987-01-01), Nakashima et al.
patent: 4637774 (1987-01-01), Nakamura et al.
patent: 4638234 (1987-01-01), Schroder et al.
patent: 4642021 (1987-02-01), Kikuchi
patent: 4644897 (1987-02-01), Fender
patent: 4646009 (1987-02-01), Mallory
patent: 4659280 (1987-04-01), Akeel
patent: 4661040 (1987-04-01), Cigna
patent: 4664232 (1987-05-01), Takagi et al.
patent: 4667443 (1987-05-01), Sakurai et al.
patent: 4668155 (1987-05-01), Kaufmann et al.
patent: 4674947 (1987-06-01), Hamada et al.
patent: 4675502 (1987-06-01), Haefner et al.
patent: 4682932 (1987-07-01), Yoshino
patent: 4684312 (1987-08-01), Antoszewski et al.
patent: 4685349 (1987-08-01), Wada et al.
patent: 4688985 (1987-08-01), Hartmann
patent: 4692695 (1987-09-01), Poduje
patent: 4693663 (1987-09-01), Brenholt et al.
patent: 4696612 (1987-09-01), Germond et al.
patent: 4697978 (1987-10-01), Tada et al.
patent: 4698483 (1987-10-01), Marinoni et al.
patent: 4704065 (1987-11-01), Allared
patent: 4706004 (1987-11-01), Komatsu et al.
patent: 4710092 (1987-12-01), Skoog et al.
patent: 4716350 (1987-12-01), Huang et al.
patent: 4728247 (1988-03-01), Nakashima et al.
patent: 4730975 (1988-03-01), Munakata
patent: 4733576 (1988-03-01), Zimmer et al.
patent: 4741078 (1988-05-01), Kimura
patent: 4748867 (1988-06-01), Susnjara
patent: 4750141 (1988-06-01), Judell et al.
patent: 4753824 (1988-06-01), Toda et al.
patent: 4755333 (1988-07-01), Gray
patent: 4758036 (1988-07-01), Legille et al.
patent: 4761114 (1988-08-01), Barland
patent: 4768918 (1988-09-01), Gorman et al.
patent: 4775289 (1988-10-01), Kazerooni
patent: 4776230 (1988-10-01), Susnjara
patent: 4784010 (1988-11-01), Wood et al.
patent: 4786227 (1988-11-01), Kremer et al.
patent: 4793203 (1988-12-01), Staggl et al.
patent: 4798321 (1989-01-01), Moran
patent: 4803895 (1989-02-01), Nishizawa et al.
patent: 4807273 (1989-02-01), Haendle
patent: 4807486 (1989-02-01), Akeel et al.
patent: 4819167 (1989-04-01), Cheng et al.
patent: 4820113 (1989-04-01), Farquhar
patent: 4821207 (1989-04-01), Minget et al.
patent: 4822200 (1989-04-01), Berner
patent: 4823279 (1989-04-01), Perzley et al.
patent: 4827689 (1989-05-01), Lonardi et al.
patent: 4827954 (1989-05-01), Layton
patent: 4835995 (1989-06-01), Vacant
patent: 4843561 (1989-06-01), Larson
patent: 4845992 (1989-07-01), Dean
patent: 4848641 (1989-07-01), Park et al.
patent: 4849916 (1989-07-01), Abbe et al.
patent: 4850782 (1989-07-01), Focke
patent: 4859139 (1989-08-01), Torii et al.
patent: 4860229 (1989-08-01), Abbe et al.
patent: 4861087 (1989-08-01), Park
patent: 4864438 (1989-09-01), Munro
patent: 4864888 (1989-09-01), Iwata
patent: 4874286 (1989-10-01), Koster et al.
patent: 4878393 (1989-11-01), Duta et al.
patent: 4881863 (1989-11-01), Braginsky
patent: 4882527 (1989-11-01), Yakuyama et al.
patent: 4892992 (1990-01-01), Akeel et al.
patent: 4898416 (1990-02-01), Hubbard et al.
patent: 4899145 (1990-02-01), Okuda et al.
patent: 4901627 (1990-02-01), Schulze
patent: 4904153 (1990-02-01), Iwasawa et al.
patent: 4908777 (1990-03-01), Wolfe
patent: 4910453 (1990-03-01), Abbe et al.
patent: 4911597 (1990-03-01), Maydan et al.
patent: 4915574 (1990-04-01), Park et al.
patent: 4931962 (1990-06-01), Palleiko
patent: 4941106 (1990-07-01), Krieger
patent: 4945429 (1990-07-01), Munro et al.
patent: 4946337 (1990-08-01), Tonai et al.
patent: 4951517 (1990-08-01), Azuma et al.
patent: 4964362 (1990-10-01), Dominguez
patent: 4969108 (1990-11-01), Webb et al.
patent: 4972347 (1990-11-01), Tarvin et al.
patent: 4986724 (1991-01-01), Steinmetz et al.
patent: 4995286 (1991-02-01), Kobayashi et al.
patent: 5014183 (1991-05-01), Carpenter et al.
patent: 5080415 (1992-01-01), Bjornson
patent: 5102280 (1992-04-01), Poduje et al.
patent: 5332352 (1994-07-01), Poduje et al.
Rorze Corporation reference machine drawing, (1 page, 1986).
Fumio Sakiya, article from a Japanese magazine, Aug. 1987, pp. 54-56.

Affiliated with

Also associated with

Rating

Robot prealigner does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Robot prealigner, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Robot prealigner will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2306848