Robot prealigner

Details Robot prealigner Robot prealigner

1989-03-07

1992-04-07

Basinger, Sherman

Material or article handling

Apparatus for charging a load holding or supporting element...

Load holding or supporting element including gripping means

4147445, 4147446, 414749, 414757, 414783, 198394, B65G 4724

Patent

active

051022800

ABSTRACT:
An alignment station for elements such as semiconductor wafers on a robot arm uses a rotating support and edge detector which in combination are operative to place a wafer on the rotating support, detect wafer alignment, move the wafer to bring it into alignment either on the rotating support itself or onto a separate station.

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