Robot prealigner

Details Robot prealigner Robot prealigner

1992-04-06

1994-07-26

Huppert, Michael S.

Material or article handling

Apparatus for charging a load holding or supporting element...

Load holding or supporting element including gripping means

4147445, 4147446, 901 6, 901 15, B25J 906

Patent

active

053323521

ABSTRACT:
An alignment station for elements such as semiconductor wafers on a robot arm uses a rotating support and edge detector which in combination are operative to place a wafer on the rotating support, detect wafer alignment, move the wafer to bring it into alignment either on the rotating support itself or onto a separate station.

REFERENCES:
patent: 4457664 (1984-07-01), Judell et al.
patent: 4695215 (1987-09-01), Jacoby et al.
patent: 4836733 (1989-06-01), Hertel et al.
patent: 4897015 (1990-01-01), Abbe et al.

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