Robot mounting de-coupling technique

Details Robot mounting de-coupling technique Robot mounting de-coupling technique

1998-01-16

1999-08-03

Bucci, David A.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

29434, 29450, 414939, B65G 6502

Patent

active

059316268

ABSTRACT:
A substrate processing apparatus includes a support frame, a substrate transport chamber connected to the support frame, and a substrate transfer robot located at least partially in the substrate transport chamber. The support frame includes a first section directly connected to the substrate transport chamber, and a second section directly connected to the substrate transfer robot. The second section is separate from the first section and includes mounting arms having leveling points. The leveling points support the substrate transfer robot and align the robot relative to the transport chamber. Further, the substrate transport chamber includes a wall having an aperture. The substrate transfer robot is located in the aperture. A flexible coupling flange is mounted between the wall of the substrate transport chamber and the substrate transfer robot. The flexible coupling flange seals a portion of the aperture between the wall and the substrate transfer robot.

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patent: 5752796 (1998-05-01), Muka
patent: 5788447 (1998-08-01), Yonemitsu et al.

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