Robot having a centering and flat finding means

Details Robot having a centering and flat finding means Robot having a centering and flat finding means

1998-08-04

2000-10-03

Morse, Gregory A.

Material or article handling

Horizontally swinging load support

Swinging about pivot

414754, 414936, 414800, H01L 2168

Patent

active

06126380&

ABSTRACT:
The present invention is a wafer handling robot which does not require a second mechanism for performing the task of pre-alignment. The robot uses the moving elements of the wafer handling robot which perform the wafer handling tasks to perform the tasks of centering and notch or flat finding of a wafer.

REFERENCES:
patent: 4770590 (1988-09-01), Hugues et al.
patent: 4887904 (1989-12-01), Nakazato et al.
patent: 5102280 (1992-04-01), Poduje et al.
patent: 5474410 (1995-12-01), Ozawa et al.
patent: 5504345 (1996-04-01), Bartunek et al.

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