Robot-guidance assembly for providing a precision motion of...

Details Robot-guidance assembly for providing a precision motion of... Robot-guidance assembly for providing a precision motion of...

2007-09-04

2007-09-04

Underwood, Donald (Department: 3652)

Material or article handling

Horizontally swinging load support

Swinging about pivot

C074S490010, C414S749100, C414S806000, C901S015000

Reexamination Certificate

active

11062154

ABSTRACT:
There is provided a robot-guidance assembly for providing a precision motion of an object, especially for providing a precision motion of a disklike member such as a wafer, including a robot having at least one robot arm. The at least one robot arm has a free end and a fixed end. The robot can move the free end of the at least one robot arm in at least one moving plane. The assembly also includes a guiding apparatus for precisely guiding the free end of the at least one robot arm in the at least one moving plane. There is also provided a method for inspecting a surface of an object.

REFERENCES:
patent: 4523100 (1985-06-01), Payne
patent: 6109677 (2000-08-01), Anthony
patent: 6910847 (2005-06-01), Blaufus et al.
patent: 2003/0218456 (2003-11-01), Brunner et al.
patent: WO 02/02282 (2002-01-01), None
European Search Report, dated Jan. 17, 2005.

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