Machine element or mechanism – Control lever and linkage systems – Multiple controlling elements for single controlled element
Patent
1998-06-04
2000-05-16
Graysay, Tamara L.
Machine element or mechanism
Control lever and linkage systems
Multiple controlling elements for single controlled element
7449003, 901 23, G05G 1100
Patent
active
060620994
DESCRIPTION:
BRIEF SUMMARY
TECHNICAL FIELD
The present invention relates to a handling robot in a multiple chamber type manufacturing system such as a semiconductor manufacturing system and an LCD manufacturing system, in which a plurality of process chambers are disposed around a single transfer chamber to constitute a like plurality of stations, and in which a workpiece in the form of a thin plate such as a wafer that is to be machined and processed in each of the process chambers is, in a clean state or an evacuated (low pressure) state, conveyed by the said handling robot that is arranged in the transfer chamber, via the said transfer chamber from one of the said process chambers to another.
BACKGROUND ART
A multiple chamber type semiconductor manufacturing system is constructed as shown in FIG. 1 of the drawings attached hereto and has a plurality of process chamber stations 2a, 2b, 2c, 2d and 2e disposed around a transfer chamber 1 and also has arranged therein a pair of workpiece delivery stations 3 by each of which the workpiece is delivered to an outside thereof, and in which the space within the transfer chamber 1 is kept in an evacuated state by a suction unit.
And, the above mentioned transfer chamber 1 is constructed as shown in FIG. 2 of the drawings attached hereto and has a handling robot A provided at a central region thereof so as to be rotatable. It also is provided with a plurality of partition walls 5 that serve as the peripheral walls thereof with each wall opposing to each of the said stations 2a, 2b, 2c, 2d and 2e and the said workpiece delivery stations 3 and in which there are also provided a plurality of gates 56 each of which constitutes both an inlet and an outlet for the workpiece to be fed into and out of each of the said stations. Each such gate 6 is configured so as to be opened and closed by an opening and closing door (not shown) that is disposed in opposition to each of the said gates 6.
As the above mentioned handling robot A, there has hitherto been used an apparatus of so called flog leg type with a pair of arms and its construction is as shown in FIGS. 3 to 7 of the drawings attached hereto.
In this construction, the said pair of arms, designated at 7a and 7b, of an identical length are arranged so as to be rotatable about a center of rotation. On the other hand, there are provided a pair of transfer tables 8a and 8b that have their respective bases, to each of which is connected one end of each of two legs of each of a pair of links 9a and 9b of an identical length, respectively. The said one end of each of the said two legs of each of the both links 9a and 9b is coupled via a flog leg type transfer table attitude regulating mechanism to each of the said transfer tables 8a and 8b, respectively, so that the said links 9a and 9b may be rotated in a pair of directions each of which is completely symmetrical with respect to the said transfer tables 8a and 8b.
And, one of the pair of links 9a and 9b which are coupled to the said transfer tables 8a and 8b is coupled to one of the said pair of arms 7a and 7b whereas the other of the said links 9a and 9b is coupled to the other of the said arms 7a and 7b, respectively.
FIG. 4A in the drawings attached hereto shows the said transfer table attitude regulating mechanism B of the above mentioned flog leg type, in which the respective forward end portions of the said links 9a and 9b in the pair which are coupled to the said transfer tables 8a and 8b are coupled together in a gear configuration that comprises a pair of gears 9c and 9c which mesh with each other so that the angles of attitude .theta. R and .theta. L of the said links 9a and 9b with respect to the said transfer tables 8a and 8b may always be identical to each other. This allows each of the said transfer tables 8a and 8b to be always oriented in a radial direction and operated in the radial direction.
It should be noted, however, that the above mentioned links 8a and 9b may not necessarily be coupled together in a gear arrangement, but may alternatively be coupled together with a crossed
REFERENCES:
patent: 5771748 (1998-06-01), Genov et al.
patent: 5879127 (1999-03-01), Grunes et al.
patent: 5894760 (1999-04-01), Caveney
WO97/27977, Entire Document, Aug. 7, 1997.
Hatake Kazuhiro
Suwa Tatsunori
Fenstermacher David
Graysay Tamara L.
Komatsu Ltd.
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