Robot end effector for automated wet wafer processing

Details Robot end effector for automated wet wafer processing Robot end effector for automated wet wafer processing

1997-12-01

2000-04-18

Browne, Lynne H.

Joints and connections

Rod end to transverse side of member

Utilizing opposite sides of member

403230, 414941, 7449001, B25G 300

Patent

active

06050739&

ABSTRACT:
A robot end effector for automated processing facilitates wet wafer processing by improving the maintenance of the end effector. In particular, the end effector may be exposed to a variety of chemical conditions in the course of its operation. By making the end effector finger removable from the arm, maintenance of the end effector finger is facilitated. By providing alignment means between the end effector finger and the arm, one can insure that the finger is accurately positioned on the arm after such maintenance.

REFERENCES:
patent: 3656393 (1972-04-01), Goellner
patent: 4461195 (1984-07-01), Barnick
patent: 4518349 (1985-05-01), Tressler et al.
patent: 4604027 (1986-08-01), Becker et al.
patent: 5295777 (1994-03-01), Hodos
patent: 5440971 (1995-08-01), Yuda
patent: 5570994 (1996-11-01), Somekh et al.
patent: 5613793 (1997-03-01), Dennis et al.
patent: 5679160 (1997-10-01), Wallace et al.
patent: 5759268 (1998-06-01), Begin et al.

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