Handling: hand and hoist-line implements – Grapple – Fixed and moveable jaw
Reexamination Certificate
2005-07-05
2005-07-05
Underwood, Donald W. (Department: 3652)
Handling: hand and hoist-line implements
Grapple
Fixed and moveable jaw
C294S907000, C414S744800, C901S039000
Reexamination Certificate
active
06913302
ABSTRACT:
An edge gripping device grips and ungrips a substrate, such as a semiconductor wafer. A blade extends in a distal direction from a base of the device. At least one distal contact member is provided at the tip of the blade. Two proximal lever arms are pivotally coupled for synchronized, oppositely directed rotation to the base. Each lever arm has at least one proximal contact member at an outer end. A biasing member is coupled to the two proximal lever arms and to an actuator to effect pivoting movement of the lever arms. The pivoting motion moves the ends of the arms generally radially toward and away from the center of the substrate to be gripped or ungripped, thereby minimizing sliding of the substrate. The biasing member is biased to retain the lever arms in a closed position in the event of a power failure. Ramps are provided next to each contact member. The contact members and ramps are profiled to minimize the zone of the substrate edge that is contacted. The lever arms are pivotally mounted with flexural pivot members having no sliding motion, to minimize particle generation.
REFERENCES:
patent: 3807029 (1974-04-01), Troeger
patent: 3811665 (1974-05-01), Seelig
patent: 3813089 (1974-05-01), Troeger
patent: 3825992 (1974-07-01), Troeger
patent: 4639028 (1987-01-01), Olson
patent: 6283701 (2001-09-01), Sundar et al.
US 6,227,585, 5/2001, Govzman et al. (withdrawn)
Charif Malek
Hwang Ted
Mann Joseph
Rouland Jean-Pascal
Yokota Chuckson
Pickreign Richard
PRI Automation, Inc.
Underwood Donald W.
Weingarten Schurgin, Gagnebin & Lebovici LLP
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