Cleaning and liquid contact with solids – Apparatus – With plural means for supplying or applying different fluids...
Patent
1984-07-02
1987-07-28
Hornsby, Harvey C.
Cleaning and liquid contact with solids
Apparatus
With plural means for supplying or applying different fluids...
134 94, 134198, 134 95, B08B 308
Patent
active
046826157
ABSTRACT:
In a chemical processing system for processing substrates or wafers in the production of electronic devices or integrated circuit chips, a rinsing step of simultaneously thoroughly rinsing the substrate in the processing chamber while the chemical supply lines and chemical spray posts are also being thoroughly rinsed with rinse water directed down a drain and without spraying into the processing chamber by controlling the pressure or rate of flow of rinsing water through the liquid chemical supply lines and chemical spray post passages and orifices so that most of the rinsing water will flow through an open drain valve and down the drain and only a trickle of water is permitted to flow outwardly through the spray orifices of the chemical spray post so that none of the rinsing water with dilute traces of chemical is sprayed onto the substrates in the processing chamber. A separate and dedicated rinsing water spray post or head is provided for directing rinsing water atomized by inert gas such as nitrogen to instantaneously commence rinsing of the wafers in the processing chamber. The liquid chemical spray posts are provided with pipe connections to the chemical supply passages within the spray post to accommodate rinsing water flow through the passages and out through the drain ducts and through an openable drain valve to a drain so that rinsing water may freely flow through the chemical supply lines and chemical supply passages in the chemical spray heads simultaneously with the application of rinsing water from the dedicated rinsing water spray post on the chamber wall.
REFERENCES:
patent: 2369358 (1945-02-01), Lathrop et al.
patent: 2609827 (1952-09-01), Christie
patent: 3012921 (1961-12-01), Vaughan
patent: 3489608 (1970-01-01), Jacobs et al.
patent: 3719191 (1973-03-01), Zimmerly
patent: 3990462 (1976-11-01), Elftmann
patent: 4027686 (1977-06-01), Shortes et al.
patent: 4132567 (1979-01-01), Blackwood
patent: 4221228 (1980-09-01), Stoffel et al.
patent: 4286541 (1981-09-01), Blackwood
patent: 4429983 (1984-02-01), Cortellino et al.
Burkman Don C.
Peterson Charlie A.
Schumacher David D.
FSI Corporation
Hornsby Harvey C.
Stinson Frankie L.
LandOfFree
Rinsing in acid processing of substrates does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Rinsing in acid processing of substrates, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Rinsing in acid processing of substrates will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2030262