Rigid thin windows for vacuum applications

Details Rigid thin windows for vacuum applications Rigid thin windows for vacuum applications

1996-07-19

1999-12-14

Chang, Ceila

Electric lamp and discharge devices

Cathode ray tube

Electron permeable window

378161, H01J 3300, G21K 100

Patent

active

060022027

ABSTRACT:
A thin window that stands off atmospheric pressure is fabricated using photolithographic and wet chemical etching techniques and comprises at least two layers: an etch stop layer and a protective barrier layer. The window structure also comprises a series of support ribs running the width of the window. The windows are typically made of boron-doped silicon and silicon nitride and are useful in instruments such as electron beam guns and x-ray detectors. In an electron beam gun, the window does not impede the electrons and has demonstrated outstanding gun performance and survivability during the gun tube manufacturing process.

REFERENCES:
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patent: 4468282 (1984-08-01), Neukermans
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patent: 4910435 (1990-03-01), Wakalopulos
patent: 4956835 (1990-09-01), Aden
patent: 5414267 (1995-05-01), Wakalopulos
patent: 5612588 (1997-03-01), Wakalopulos
Electron Window Cathode Ray Tube Applications, L. Hanlon, M. Greenstein, W. Grossman, and A. Neukermans, J. Vac. Sci. Technol. B 4 (1), Jan./Feb. 1986, pp. 305-309.

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