Ridge-waveguide buried-heterostructure laser and method of fabri

Coherent light generators – Particular active media – Semiconductor

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372 45, 372 50, 437129, H01S 319

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active

051386267

ABSTRACT:
A laser structure achieves high reliability, good bandwidth and performance characteristics and a fabrication procedure that is compatible with other IC devices by providing an active lasing region below an optical mode confining ridge. The active region is preferably a multiple quantum well (MQW) that is sandwiched between upper and lower cladding layers. The portions of the MQW lateral to the ridge are compositionally disordered to give them a larger bandgap energy and lower refractive index than the active MQW region, and thus resist charge carrier spreading from the MQW. The ridge provides the primary optical mode confinement, allowing a shallow burial of the MQW to a depth less than 0.5 microns. This permits the compositional disordering of the lateral MQW regions to be performed by a heated ion implantation process that requires a lower temperature than separate implantation and annealing, and is compatible with the provision of additional circuitry on the same substrate.

REFERENCES:
patent: 4731789 (1988-03-01), Thornton
patent: 4802182 (1989-01-01), Thornton et al.
patent: 4827483 (1989-05-01), Fukuzawa et al.
patent: 4932033 (1990-06-01), Miyazawa et al.
patent: 4990466 (1991-02-01), Shieh et al.
patent: 5022036 (1991-06-01), Suyama et al.
Anderson et al., "Compositional Disordering of GaAs/AlGaAs Multiple Quantum Wells Using Ion Bombardment at Elevated Temperatures", Appl. Phys. Lett. 53(17), pp. 1632-1634, Oct. 24, 1988.
Kaminow et al., "Low-Threshold InGaAsP Ridge Waveguide Lasers at 1.3 .mu.m", IEEE Journal of Quantum Electronics, vol. QE-19, No. 8, pp. 1312-1318, Aug. 1983.
Meehan et al., "Stripe-Geometry AlGaAs-GaAs Quantum-Well Heterostructure Lasers Defined by Impurity-Induced Layer Disordering", Apply. Phys. Lett. 44(7), pp. 700-702, Apr. 1, 1984.
Fukuzawa et al., "GaAlAs Buried Multiquantum Well Lasers Fabricated by Diffusion-Induced Disordering", Apply. Phys. Lett. 45(1), pp. 1-3, Jul. 1, 1984.
Introduction to Semiconductor Technology: GaAs and Related Compounds, Edited by Cheng T. Wang, John Wiley & Sons, pp. 512-535, Jan. 1990.
O. Wada et al., "Very Low Threshold Current Ridge-Waveguide AlGaAs/GaAs Single-Quantum-Well Lasers", Electronics Letters, vol. 21, No. 22, Oct. 24, 1985, pp. 1025-1026.
H. D. Wolf et al., "High-Speed AlGaAs/GaAs Multiple Quantum Well Ridge Waveguide Lasers", Electronics Letters, vol. 25, No. 13, Aug. 31, 1989, pp. 1245-1246.

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