Ribbed and bossed pressure transducer

Details Ribbed and bossed pressure transducer Ribbed and bossed pressure transducer

1990-12-20

1992-10-20

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

296211, 73721, 338 4, 338 42, G01L 708, G01L 906

Patent

active

051560526

ABSTRACT:
A pressure transducer having means for improving the linearity and sensitivity of an output signal from the pressure transducer. Ribs and bosses are introduced in the diaphragm region to collect the moments caused by a difference in pressure on the two sides of the diaphragm and thus improve device sensitivity. In addition, the ribs and bosses prevent stretching of the piezoresistors thus improving the linearity of the device. A constraint can also be included to improve the alignment of the piezoresistors thus improving the linearity of the device.

REFERENCES:
patent: 3869906 (1975-03-01), Andersson
patent: 4545255 (1985-10-01), Pugnaire
patent: 4570498 (1986-02-01), Okayama
Yasukawa et al., "Simulation of Circular Silicon Pressure Sensors with a Center Boss for Very Low Pressure Measurement" IEEE Transaction on Electron Devices, vol. 36, No. 7, Jul. 1989.

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