RF power delivery diagnostic system

Details RF power delivery diagnostic system RF power delivery diagnostic system

2011-08-30

2011-08-30

Phu, Sanh D (Department: 2618)

Telecommunications

Radiotelephone system

Security or fraud prevention

C455S248100, C455S320000, C455S330000, C702S106000, C702S107000, C324S464000

Reexamination Certificate

active

08010084

ABSTRACT:
An RF power delivery diagnostic system is provided herein. The system comprises an RF power source (303), an impedance matching network (305), a plasma reactor (307) in electrical contact with the RF power source by way of the impedance matching network, a first RF sensor (309) adapted to measure at least one attribute of the RF power input to the impedance matching network, and a second RF sensor (311) adapted to measure at least one attribute of the RF power output by the impedance matching network.

REFERENCES:
patent: 5314603 (1994-05-01), Sugiyama et al.
patent: 6291999 (2001-09-01), Nishimori et al.
patent: 6946847 (2005-09-01), Nishimori et al.
patent: 7796368 (2010-09-01), Kotani et al.

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