RF Heating coil construction for stack of susceptors

Details RF Heating coil construction for stack of susceptors RF Heating coil construction for stack of susceptors

1980-07-03

1982-07-13

Reynolds, B. A.

Electric heating

Metal heating

Of cylinders

219 1043, 219 1079, 118725, 118730, 118 501, 118620, 427 451, 148174, H05B 640, C23C 1308

Patent

active

043396453

ABSTRACT:
Arrangement for RF heating a stack of disc-like susceptor elements lying in parallel planes in which a coil surrounding the elements creates the RF field. The coil comprises a plurality of turns which are saddle-shaped and oriented so that a turn generates a field which inductively heats at least two of the susceptor elements and so that most elements are heated by fields created by at least two turns.

REFERENCES:
patent: 2469640 (1949-05-01), Gillespie
patent: 3031555 (1962-04-01), Ross et al.
patent: 3212858 (1965-10-01), Smith et al.
patent: 3539759 (1970-11-01), Spiro et al.
patent: 3549847 (1970-12-01), Clark et al.
patent: 3699298 (1972-10-01), Briody
patent: 3845738 (1974-11-01), Berkman et al.
patent: 3980854 (1976-09-01), Berkman et al.
patent: 4062318 (1977-12-01), Ban et al.
patent: 4112285 (1978-09-01), Pan et al.
Journal of Crystal Growth, "Novel Reactor for High Volume Low-Cost Silicon Epitaxy", V. S. Ban, vol. 45 (1978), pp. 97-107.

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