RF electrode for a process tube of semiconductor...

Details RF electrode for a process tube of semiconductor... RF electrode for a process tube of semiconductor...

2006-06-02

2008-03-18

Spear, Robert M. (Department: 2914)

Equipment for production, distribution, or transformation of ene

Distribution, modification or control

Semiconductor, transistor or integrated circuit

Design Patent

active

D0564462

CLAIM:
The ornamental design for a RF electrode for a process tube of semiconductor manufacturing apparatus, as shown and described.

REFERENCES:
patent: 2481079 (1949-09-01), Casey
patent: 3323954 (1967-06-01), Goorissen
patent: D320446 (1991-10-01), Grossi et al.
patent: D436138 (2001-01-01), Chiasson
patent: 6277260 (2001-08-01), Kaufman et al.

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