Wave transmission lines and networks – Plural channel systems – Having branched circuits
Reexamination Certificate
2006-05-09
2006-05-09
Pascal, Robert (Department: 2817)
Wave transmission lines and networks
Plural channel systems
Having branched circuits
C333S017300, C333S033000
Reexamination Certificate
active
07042311
ABSTRACT:
In one embodiment, a system for delivering radio frequency (RF) power to a plasma processing system includes an automatic impedance matching network configured to receive RF power from an RF generator, and a fixed impedance matching network coupled between the automatic impedance matching network and the plasma processing chamber. The fixed impedance matching network may be configured to transform a first impedance presented by the chamber to a second impedance that allows the automatic impedance matching network to operate within a tuning range.
REFERENCES:
patent: 3805165 (1974-04-01), Hoffman
patent: 4629940 (1986-12-01), Gagne et al.
patent: 4812712 (1989-03-01), Onishi et al.
patent: 4824546 (1989-04-01), Ohmi
patent: 5110438 (1992-05-01), Ohmi et al.
patent: RE34106 (1992-10-01), Ohmi
patent: 5187457 (1993-02-01), Chawla et al.
patent: 5392018 (1995-02-01), Collins et al.
patent: 5653811 (1997-08-01), Chan
patent: 5660694 (1997-08-01), Ohmi et al.
patent: 5747935 (1998-05-01), Porter et al.
patent: 5849136 (1998-12-01), Mintz et al.
patent: 5892198 (1999-04-01), Barnes et al.
patent: 6036878 (2000-03-01), Collins
patent: 6046546 (2000-04-01), Porter et al.
patent: 6063234 (2000-05-01), Chen et al.
patent: 6252354 (2001-06-01), Collins et al.
patent: 6259334 (2001-07-01), Howald
patent: 6361645 (2002-03-01), Schoepp et al.
patent: 6424232 (2002-07-01), Mavretic et al.
patent: 6474257 (2002-11-01), Jeng
patent: 6516742 (2003-02-01), Blalock et al.
patent: 6552297 (2003-04-01), Blonigan et al.
patent: 6577113 (2003-06-01), Sill et al.
patent: 6630792 (2003-10-01), Okumura
patent: 6631693 (2003-10-01), Hilliker
patent: 6677711 (2004-01-01), MacGearailt
patent: 6705246 (2004-03-01), Sharan et al.
patent: 6753689 (2004-06-01), Thomas
patent: 6917204 (2005-07-01), Mitrovic et al.
patent: 62-136112 (1987-06-01), None
patent: 62-171233 (1987-07-01), None
patent: 03-165110 (1991-07-01), None
patent: 08-204472 (1996-08-01), None
Hilliker Stephen E.
Rubin Yan
Sebastian Anthony E.
Thomas George
Glenn Kimberly
Novellus Systems Inc.
Okamoto & Benedicto LLP
Pascal Robert
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