Revolving drum polishing apparatus

Details Revolving drum polishing apparatus Revolving drum polishing apparatus

1995-10-30

1997-07-01

Smith, James G.

Abrading

Abrading process

Glass or stone abrading

451182, B24B 100

Patent

active

056430566

ABSTRACT:
A drum-type polishing apparatus for producing a flat mirror polish on an object such as a semiconductor wafer, is capable of three degrees of freedom of movement of a drum member with respect to the wafer. The relative movements can be made, successively or simultaneously, at right angles to an axis of the drum, parallel to the surface of the wafer, as well as at any desired angular orientations. Combined with a follower device to provide automatic compensation for unevenness in pressing pressure applied to the wafer during polishing, the polishing apparatus offers outstanding uniformity in polishing quality and high productivity, even for large diameter wafers, with a comparatively modest investment in both facility space and equipment cost.

REFERENCES:
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patent: 1223155 (1917-04-01), Drake
patent: 1665954 (1928-04-01), Fox
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patent: 4513543 (1985-04-01), Lawrenson et al.
patent: 4564000 (1986-01-01), Stern et al.
patent: 4934102 (1990-06-01), Leach et al.
patent: 5083401 (1992-01-01), Yamashita et al.
patent: 5094037 (1992-03-01), Hakomori et al.
patent: 5097630 (1992-03-01), Maeda et al.

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