Revolution member supporting apparatus and semiconductor...

Details Revolution member supporting apparatus and semiconductor... Revolution member supporting apparatus and semiconductor...

2005-07-26

2005-07-26

Hassanzadel, P. (Department: 1763)

Chemistry: electrical and wave energy

Apparatus

Electrolytic

C204S22400M, C204S22400M, C156S345220, C118S719000

Reexamination Certificate

active

06921466

ABSTRACT:
A revolution member supporting apparatus holds and rotates a disc-shaped object (object to be rotated) such as a semiconductor wafer. The revolution member supporting apparatus includes a rotatable member which rotates about an axis of roation, and a plurality of holding members which are disposed along a circle having a center corresponding to the axis of rotation of the rotatable member, and which revolve around the axis of rotation when the rotatable member rotates, wherein the holding members are allowed to swing about their own central axes.

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