Review work supporting system

Details Review work supporting system Review work supporting system

2005-12-20

2005-12-20

Ahmed, Samir (Department: 2623)

Image analysis

Applications

Manufacturing or product inspection

C029S833000, C348S126000, C700S110000, C700S121000, C700S143000

Reexamination Certificate

active

06978041

ABSTRACT:
An object of the present invention is to increase efficiency in review work by appropriately narrowing down review work that verifies shapes of visual defects relating to an enormous amount of defects detected by a visual inspecting apparatus with high sensitivity. In order to appropriately extract defect information from an inspecting apparatus, a filter function and a sampling function are prepared by unitizing the functions. As a result, defects as review targets are narrowed down and extracted automatically using the filter function and the sampling function in combination. In addition, sequencing the filter conditions and the sampling conditions and registering the sequence enables automatic filtering and sampling on the basis of information on a wafer as a review target, and thereby only defect information on the review target is extracted.

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