Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2005-05-03
2005-05-03
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S072000
Reexamination Certificate
active
06888617
ABSTRACT:
A double bellows seal including a plurality of rings having first and second end rings, a middle ring, a first bellows, and a second bellows. The first bellows is formed from a flexible material that is sealingly connected between the first end ring and the middle ring, and it has a twist bias in a first rotational direction relative to an axis of the rings. The second bellows is formed from a flexible material that is sealingly connected between the second end ring and the middle ring. The second bellows has a twist bias in a second rotational direction relative to an axis of the rings that is opposite that of the first rotational direction.
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Miller et al., The Development of 157nm Small Field and Mid-Field MicroStepphers, SPIE 2000 #4000.
Phillips Alton Hugh
Sugimoto Hiroshi
Beyer Weaver & Thomas LLP
Nguyen Henry Hung
Nikon Corporation
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