Reverse linear polisher with loadable housing

Details Reverse linear polisher with loadable housing Reverse linear polisher with loadable housing

1998-12-01

2000-08-15

Powell, William

Semiconductor device manufacturing: process

Chemical etching

Combined with the removal of material by nonchemical means

156345LP, 216 88, 438745, H01L 2100

Patent

active

061036285

ABSTRACT:
The present invention is directed to a method and apparatus for polishing a surface of a semiconductor wafer using a pad moveable in both forward and reverse directions. In both VLSI and ULSI applications, polishing the wafer surface to complete flatness is highly desirable. The forward and reverse movement of the polishing pad provides superior planarity and uniformity to the surface of the wafer. The wafer surface is pressed against the polishing pad as the pad moves in both forward and reverse directions while polishing the wafer surface. During polishing, the wafer is supported by a wafer housing having a novel wafer loading and unloading method.

REFERENCES:
patent: 4802309 (1989-02-01), Heynacher
patent: 5245796 (1993-09-01), Miller et al.
patent: 5335453 (1994-08-01), Baldy et al.
patent: 5558568 (1996-09-01), Talieh et al.
patent: 5650039 (1997-07-01), Talieh
patent: 5679212 (1997-10-01), Kato et al.
patent: 5692947 (1997-12-01), Talieh et al.
patent: 5762751 (1998-06-01), Bleck et al.
patent: 5770521 (1998-06-01), Pollock
patent: 5807165 (1998-09-01), Uzoh et al.
J.M. Steigerwald, R. Zirpoli, S.P. Murarka, D. Price and R.J. Gutman, "Pattern Geometry Effects in the Chemical-Mechanical Polishing of Inlaid Copper Structures", Oct. 1994, pp. 2842-2848.

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