Reuse in semiconductor measurement recipes

Details Reuse in semiconductor measurement recipes Reuse in semiconductor measurement recipes

2006-05-16

2006-05-16

Whitmore, Stacy A. (Department: 2825)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C716S030000, C382S145000, C702S081000

Reexamination Certificate

active

07047101

ABSTRACT:
A semiconductor measurement recipe architecture organized to include reusable sub-recipes, each defining at least one parameter associated with either a semiconductor wafer and/or a semiconductor disposed thereon, is disclosed. This recipe architecture will include a set of parameter dependencies, one or more which having a respective relationship with of the sub-recipes to permit safe and reliable sub-recipe reuse. Also disclosed is a recipe generation method including: determining an appropriate baseline existing recipe that's organized to include a set of parameter dependencies and dependency related sub-recipes; perceiving a dependency change; determining which, if any, of the sub-recipes of the existing recipe remain unaffected after the dependency change(s); and generating a new recipe using at least one of the sub-recipes found to be unaffected.

REFERENCES:
patent: 6298470 (2001-10-01), Breiner et al.
patent: 2001/0034818 (2001-10-01), May et al.

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