Optics: measuring and testing – Sample – specimen – or standard holder or support – Fluid containers
Reexamination Certificate
2009-02-04
2011-11-15
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
Sample, specimen, or standard holder or support
Fluid containers
C356S244000, C250S440110
Reexamination Certificate
active
08059271
ABSTRACT:
A reusable sample-holding device for readily loading very small wet samples for observation of the samples by microscopic equipment, in particular in a vacuum environment. Embodiments may be used with a scanning electron microscope (SEM), a transmission electron microscope (TEM), an X-ray microscope, optical microscope, and the like. For observation of the sample, embodiments provide a thin-membrane window etched in the center of each of two silicon wafers abutting to contain the sample in a small uniform gap formed between the windows. This gap may be adjusted by employing spacers. Alternatively, the thickness of a film established by the fluid in which the sample is incorporated determines the gap without need of a spacer. To optimize resolution each window may have a thickness on the order of 50 nm and the gap may be on the order of 50 nm.
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Donchev Todor I.
Franks Ryan
Liao Dongxiang
Marsh Charles P.
Olson Eric
Baugher Jr. Earl H.
Chowdhury Tarifur
Lapage Michael P
The United States of America as represented by the Secretary of
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