Retrying control method and apparatus for processing apparatus

Details Retrying control method and apparatus for processing apparatus Retrying control method and apparatus for processing apparatus

1997-10-28

2000-10-31

Grant, William

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

700112, 700121, 700228, 414935, G06F 1900

Patent

active

061416002

ABSTRACT:
Disclosed is a method of controlling a processing apparatus designed to perform a predetermined process for a target processing substrate within a processing chamber after a predetermined operation of a movable member arranged in the processing chamber. The processing apparatus instructs the driving system of the movable member to perform an operation reverse to the predetermined operation when the predetermined operation cannot be confirmed within a defined time, and instructs the driving system to perform the predetermined operation again after the reverse operation is confirmed.

REFERENCES:
patent: 5620500 (1997-04-01), Fukui et al.
patent: 5633040 (1997-05-01), Toshima et al.

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