Reticle transporter

Details Reticle transporter Reticle transporter

1986-06-24

1988-01-19

Stearns, Richard R.

Geometrical instruments

Gauge

Work support adjustment

33613, 33DIG2, 269 21, 269 55, 384 12, B23Q 104, B25B 1100, F16C 3206

Patent

active

047197056

ABSTRACT:
The described invention is a precisely adjustable transporter for moving a reticle past an optical slit as a step in the production of semiconductor wafers. The reticle stage rides along a pair of optically flat planar, intersecting, bearing surfaces supported by air bearings on each bearing surface. Pressurized air and vacuum may be simultaneously employed to effect substantially friction-free motion while preventing displacement from the bearing surfaces. Axial adjustments on each air bearing permit precise adjustment of the reticle stage and reticle.

REFERENCES:
patent: 3393648 (1968-07-01), Diehr
patent: 3476444 (1969-11-01), Dunfee
patent: 3831283 (1974-08-01), Pagella et al.
patent: 4013280 (1977-03-01), Chitayat et al.
patent: 4455910 (1984-06-01), Kraft et al.
patent: 4558909 (1985-12-01), Stauber
patent: 4643590 (1987-02-01), Olasz

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