Reticle tracking and cleaning

Details Reticle tracking and cleaning Reticle tracking and cleaning

2005-12-13

2005-12-13

Pert, Evan (Department: 2826)

Semiconductor device manufacturing: process

Miscellaneous

C430S005000, C430S644000

Reexamination Certificate

active

06974782

ABSTRACT:
A reticle assembly includes a reticle with a reticle plate. A radio frequency device is positioned on the reticle for providing information regarding the reticle to a reader by radio frequency.

REFERENCES:
patent: 6216873 (2001-04-01), Fosnight et al.
patent: 6614235 (2003-09-01), Kraz
Asyst Fluorotrac MicroTags and Antennas [online] [retrieved on Jan. 16, 2002], retrieved from http://www.asyst.com/prod/sts/sts—FMTA.html.
Brooks-PRI Automation Announces Acquisition of HERMOS Informatik GmbH [online] (press release) [retrieved on Jul. 15, 2002], retrieved from http://biz.yahoo.com/prnews/020708
em009—1.html.

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