Reticle thermal detector

Details Reticle thermal detector Reticle thermal detector

2007-10-16

2007-10-16

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000, C355S075000, C430S030000

Reexamination Certificate

active

10999624

ABSTRACT:
A reticle thermal detector for measuring a thermal condition and distortion of a reticle prior to photolithography is disclosed. The reticle thermal detector includes a mechanism for determining a degree of distortion of the reticle. An alarm is connected to the mechanism for activation by the mechanism when the reticle is distorted. The invention further includes a novel method of enhancing the quality of circuit pattern images formed on a wafer during photolithography.

REFERENCES:
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patent: 5581324 (1996-12-01), Miyai et al.
patent: 5883704 (1999-03-01), Nishi et al.
patent: 5959721 (1999-09-01), Nishi
patent: 6040096 (2000-03-01), Kakizaki et al.
patent: 6088080 (2000-07-01), Itoh
patent: 6888621 (2005-05-01), Araki et al.
patent: 2004/0141164 (2004-07-01), Tsuji et al.

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