Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate
2011-02-15
2011-02-15
Lowe, Michael S (Department: 3652)
Material or article handling
Apparatus for moving material between zones having different...
C414S217100, C414S416080, C414S940000
Reexamination Certificate
active
07887277
ABSTRACT:
A combination of a FOUP (front opening unified pod) system and a reticle system utilized for the transport of wafers and a reticle system, the latter of which are used for transporting reticles from a first fabrication site to a further site at another location, and which provides for a unified system enabling the automated and trackable delivery of the reticles between these sites. Provided is a modified FOUP base structure, which is adapted to retain a reticle and to be able to employ existing equipment in a fabrication site which only necessitates a minimal modification of the equipment in order to render the latter universally adaptable to the combination of the systems.
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Campbell Philip L.
Pinckney David J.
Sherwood Edward
Ziemins Uldis A.
International Business Machines - Corporation
Lowe Michael S
MacKlnnon, Esq. Ian
Scully , Scott, Murphy & Presser, P.C.
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