Reticle stop block apparatus and method

Details Reticle stop block apparatus and method Reticle stop block apparatus and method

2005-03-29

2005-03-29

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S072000, C355S075000, C355S076000, C414S225010, C414S331010, C414S416030, C414S416080, C414S744100, C414S780000, C414S781000

Reexamination Certificate

active

06873402

ABSTRACT:
Methods and apparatus for ensuring the proper handling of reticles in the manufacturing of microdevices are disclosed. The methods and apparatus employ one or more reticle stop blocks fixed to a reticle handling arm. The one or more reticle stop blocks are designed and arranged to engage an edge of the reticle in order to place the reticle in a desired position on the reticle handling arm should the reticle be improperly arranged in a cassette in which the reticle is stored. By ensuring proper placement of the reticle on the reticle handling arm when the reticle is removed from the cassette, the likelihood of a subsequent fault in handling the reticle is greatly reduced.

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patent: 61-176129 (1986-08-01), None

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