Reticle sorter

Details Reticle sorter Reticle sorter

1998-06-30

1999-10-26

Niebling, John F.

Semiconductor device manufacturing: process

With measuring or testing

438 15, 29 2501, 250548, 355 97, H01L 2166, G01R 3126

Patent

active

059727276

ABSTRACT:
A reticle sorter and a semiconductor fabrication facility employing one or more reticle sorters is provided. The reticle sorter(s) generally lies between a reticle storage system and a group of one or more photolithography exposure tools (e.g., steppers) and is configured for sorting reticles in one or more cassettes. The use of the reticle sorter provides sorting functionality apart from the reticle storage system and typically closer to the group of photolithography steppers with which it is associated. This can, for example, significantly increase the throughput of semiconductor wafers through the associated photolithography exposure tools as well as in the semiconductor fabrication plant as a whole.

REFERENCES:
patent: 4477926 (1984-10-01), Linger et al.
patent: 4999671 (1991-03-01), Iizuka
patent: 5727685 (1998-03-01), Laganza et al.

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