Reticle pod and reticle with cut areas

Details Reticle pod and reticle with cut areas Reticle pod and reticle with cut areas

2005-09-27

2005-09-27

Gehman, Bryon P. (Department: 3728)

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

C206S454000

Reexamination Certificate

active

06948619

ABSTRACT:
A pod for transporting reticles is made with a reticle support that has a Π-shape and is provided with pins, whose arrangement matches the location of chrome-free areas on a reticle base. Due to that, the pins, when supporting the reticle, come into contact with the reticle in chrome-free areas thereof. Thus, scratching the metallic areas and releasing metallic particles is prevented from occurring.

REFERENCES:
patent: 4842136 (1989-06-01), Nakazato et al.
patent: 5743409 (1998-04-01), Nakahara et al.
patent: 5869395 (1999-02-01), Yim
patent: 6196391 (2001-03-01), Li
patent: 6216873 (2001-04-01), Fosnight et al.
patent: 6247599 (2001-06-01), Cheng et al.

Affiliated with

Also associated with

Rating

Reticle pod and reticle with cut areas does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Reticle pod and reticle with cut areas, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Reticle pod and reticle with cut areas will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3371013