Data processing: database and file management or data structures – Database design – Data structure types
Reexamination Certificate
2006-06-06
2006-06-06
Corrielus, Jean M. (Department: 2162)
Data processing: database and file management or data structures
Database design
Data structure types
C707S793000, C707S793000
Reexamination Certificate
active
07058627
ABSTRACT:
A reticle management system is disclosed that provides data storage and retrieval of data associated with each reticle, reticle carrier, and certain system attributes and also for the efficient movement and storage of reticles and reticle carriers. The reticle management system includes a reticle management controller, a central reticle database, and one or more reticle stockers that include a stocker controller, a stocker database, and a stocker unit. The reticle management controller is coupled to the central reticle database and each of the stocker controllers. Each stocker controller collects data on the reticles, reticle carriers, or both, that are stored within the associated stocker unit and stores this data in the stocker database. The reticle management controller retrieves the data in each stocker database via the associated stocker controller and stores this data in central reticle database. In addition, data attributes for the system, and the reticle carriers within the system may also be stored in the central reticle database.
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Mariano Thomas
Wiesler Oren
Brooks Automation Inc.
Corrielus Jean M.
Weingarten Schurgin, Gagnebin & Lebovici LLP
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