Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2005-05-31
2005-05-31
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C206S710000, C206S723000, C414S217100, C414S416010, C414S931000, C414S937000
Reexamination Certificate
active
06900878
ABSTRACT:
Reticle-holding devices (reticle “pods”) are disclosed for holding circular reticles as used microlithography systems that use circular reticles. An exemplary reticle pod includes a base and cover. Mounted to the base are multiple (desirably three) reticle-support blocks providing three respective, equally spaced, reticle-contact surfaces that support a reticle in the peripheral “handling zone” of the reticle. Mounted to the inside surface of the cover are corresponding compliant pressure-application members (desirably respective flat springs terminating with respective reticle-contact members) that apply a holding force to the reticle. A respective portion of the reticle is situated between each pressure-application member and a respective reticle-support surface. Thus, the reticle, configured as a SEMI standard wafer, is stably held at three points in the handling zone of the reticle without damaging the reticle.
REFERENCES:
patent: 3-157918 (1991-07-01), None
patent: 2002-252164 (2002-09-01), None
Kikuchi Hidekazu
Okubo Yukiharu
Klarquist & Sparkman, LLP
Nikon Corporation
Rutledge D.
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