Reticle having interlocking dicing regions containing monitor ma

Details Reticle having interlocking dicing regions containing monitor ma Reticle having interlocking dicing regions containing monitor ma

1998-06-19

2000-09-05

Young, Christopher G.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

355 53, 430311, 438462, G03F 900

Patent

active

061140724

ABSTRACT:
On one of opposing sides of a rectangular prescribed region consisting of element forming regions and a dicing region placed therebetween, a dicing region is formed to have recessed and extended portions which fit recessed and extended portions of another dicing region which is arranged on the other one of the opposing sides. At extended portions of the dicing region, monitor mark regions are arranged corresponding to all four corners of the prescribed region. Therefore, a reticle which can prevent degradation in registration accuracy caused by shot rotation error or shot magnification error without increasing area of the dicing region is provided, and further, method and apparatus for exposure using the reticle are provided.

REFERENCES:
patent: 5496777 (1996-03-01), Moriyama
patent: 5795815 (1998-08-01), Vokoun et al.
patent: 5868560 (1999-02-01), Tamada et al.

Affiliated with

Also associated with

Rating

Reticle having interlocking dicing regions containing monitor ma does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Reticle having interlocking dicing regions containing monitor ma, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Reticle having interlocking dicing regions containing monitor ma will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2210532