Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-08-15
2006-08-15
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S055000, C355S067000, C355S077000, C430S005000, C430S030000, C430S311000, C250S548000, C250S492100, C356S400000, C356S401000
Reexamination Certificate
active
07092068
ABSTRACT:
A reticle includes a first mask portion including a first opaque portion, first and second exposure monitor patterns provided within first and second window portions in the first opaque portion, increasing transmittances in a first direction and a direction reverse to the first direction, respectively; and a second mask potion including a second opaque portion, third and fourth exposure monitor patterns provided within third and fourth window portions in the second opaque portion in positions corresponding to the first opaque portion upon alignment with the first mask portion, increasing transmittances in the first direction and the reverse direction, respectively.
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Dirksen et al., “Focus and exposure dose determination using stepper alignment,” SPIE (1996), 2726:799-808.
Starikov, “Exposure Monitor Structure,” SPIE (1990), 1261:315-324.
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Rutledge D.
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