Optics: measuring and testing – Of light reflection – With modulation
Reexamination Certificate
2008-03-13
2011-11-01
Toatley, Gregory J (Department: 2877)
Optics: measuring and testing
Of light reflection
With modulation
Reexamination Certificate
active
08049897
ABSTRACT:
A reticle defect inspection apparatus that suppresses deterioration of optical components resulting from luminescent spots generated by an integrator and can sustain a defect inspection with high precision for a long time is provided. The reticle defect inspection apparatus is a reticle defect inspection apparatus for inspecting for defects on a reticle using a pattern image obtained by irradiating the reticle on which a pattern is formed with light. And the apparatus includes an illuminating optical system for irradiating the reticle with an inspection light and a detecting optical system for detecting a pattern image of the reticle irradiated with the inspection light, wherein the illuminating optical system comprises an integrator for equalizing illumination distribution of the inspection light and a moving mechanism for enabling the integrator to slightly move in a direction perpendicular to an optical axis of the integrator.
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Japanese AIPN Online English Translation of JP H11-072905—Sep. 3, 2010.
Japanese AIPN Online English Translation of JP H09-082605—Sep. 2, 2010.
Hirano Ryoichi
Ogawa Riki
Kabushiki Kaisha Toshiba
NEC Corporation
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Toatley Gregory J
Valentin Juan D
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