Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate
2011-03-22
2011-03-22
Rosasco, Stephen (Department: 1721)
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
C430S311000
Reexamination Certificate
active
07910270
ABSTRACT:
The invention includes reticle constructions and methods of forming reticle constructions. In a particular aspect, a method of forming a reticle includes provision of a reticle substrate having a defined main-field region and a defined boundary region. The substrate has a relatively transparent base and a relatively opaque material over the base. A thickness of the relatively opaque material of the main-field region is reduced relative to a thickness of the relatively opaque material of the boundary region. A reticle construction of the present invention can comprise a relatively transparent base, and a relatively opaque material over the base. The construction can have a defined main-field region and a defined boundary region, and the relatively opaque material of the main-field region can have a reduced thickness relative to the relatively opaque material of the boundary region.
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Resnick, Douglas J., et al., “Initial study of the fabrication of step and flash imprint lithography templates for the printing of contact holes” Society of Photo-Optical Instrumentation Engineers, Apr. 2004, pp. 316-321, J. Microlith, Microfab., Microsyst., vol. 3, No. 2.
Fraser Stewart A
Micro)n Technology, Inc.
Rosasco Stephen
Wells St. John P.S.
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