Cleaning and liquid contact with solids – Processes – With treating fluid motion
Patent
1997-08-28
1999-08-17
Warden, Jill
Cleaning and liquid contact with solids
Processes
With treating fluid motion
134 42, 134200, 134902, 134 2, B08B 300, B08B 302
Patent
active
059388609
ABSTRACT:
A reticle having a pellicle frame and pellicle membrane is cleaned without removing or damaging the pellicle membrane. A cover encases the pellicle membrane and pellicle frame, sealing the pellicle from the external environment during a cleaning process. The cover fits around the periphery of the pellicle frame and covers the pellicle membrane. An edge of the cover in contact with the reticle forms a seal. The reticle is fastened to reticle supports on a spin chuck during the cleaning process. An anchor plate presses the cover to the reticle, maintaining the pellicle sealed from the external environment. The cover and reticle are sandwiched together between the anchor plate and spin chuck.
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Markoff Alexander
Micro)n Technology, Inc.
Warden Jill
LandOfFree
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