Reticle cleaning without damaging pellicle

Details Reticle cleaning without damaging pellicle Reticle cleaning without damaging pellicle

1999-05-12

2000-05-16

Gulakowski, Randy

Cleaning and liquid contact with solids

Processes

With treating fluid motion

134 42, 134200, 134902, 134 2, 134 33, B08B 300, B08B 302

Patent

active

060632089

ABSTRACT:
A reticle having a pellicle frame and pellicle membrane is cleaned without removing or damaging the pellicle membrane. A cover encases the pellicle membrane and pellicle frame, sealing the pellicle from the external environment during a cleaning process. The cover fits around the periphery of the pellicle frame and covers the pellicle membrane. An edge of the cover in contact with the reticle forms a seal. The reticle is fastened to reticle supports on a spin chuck during the cleaning process. An anchor plate presses the cover to the reticle, maintaining the pellicle sealed from the external environment. The cover and reticle are sandwiched together between the anchor plate and spin chuck.

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