Reticle cassette and exposure apparatus using reticle cassette

Details Reticle cassette and exposure apparatus using reticle cassette Reticle cassette and exposure apparatus using reticle cassette

2006-11-06

2008-09-30

Nguyen, Hung Henry (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C355S053000, C361S234000

Reexamination Certificate

active

07430037

ABSTRACT:
A reticle cassette includes a bearing portion and a cover, a reticle being disposed on the bearing portion and accommodated in a space between the bearing portion and the cover. The bearing portion includes electrodes for attracting using an electrostatic force and supporting a first surface of the reticle, the first surface having a pattern being formed thereon.

REFERENCES:
patent: 5636098 (1997-06-01), Salfelder et al.
patent: 6169652 (2001-01-01), Klebanoff
patent: 6781673 (2004-08-01), Moors et al.
patent: 2005/0095829 (2005-05-01), Shinichi
patent: 2005-123292 (2005-05-01), None

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