Reticle cassette

Details Reticle cassette Reticle cassette

1987-12-24

1989-05-16

Fidei, David T.

Special receptacle or package

For a vehicle

206328, 220344, 312290, 174 35GC, 277168, 277180, 277226, 277205, 277 53, 277901, B65D 7302

Patent

active

048301825

ABSTRACT:
A dust-tight container suitably usable in the manufacture of semiconductor microcircuits, for keeping therein a plate-like member such as a reticle, a photomask or a wafer is disclosed. The container has an elastomeric sealing member which is provided along an engaging portion between a container casing and a cover or door of the container, to achieve sufficiently complete dust-tight property of the container to thereby effectively prevent dust or foreign particles from entering into the container. At an engaging portion between the door and the container casing, a protrusion and a recess which mate at the time of closing of the door are provided. These mating protrusion and recess are formed at positions which are on the inner side of the elastomeric sealing member. This effectively prevents particles, adhered to the sealing member and scattering at the time of opening/closing of the door, from entering into the container.

REFERENCES:
patent: 835836 (1906-11-01), Schulz
patent: 1689735 (1928-10-01), Losel
patent: 2938363 (1960-05-01), Dickinson et al.
patent: 3013852 (1961-12-01), Rockola
patent: 3663025 (1976-05-01), Natherny et al.
patent: 3923197 (1975-12-01), Kuhn
patent: 4252332 (1981-02-01), Nakayama et al.
patent: 4564880 (1986-01-01), Christ et al.
patent: 4609103 (1986-09-01), Bimer et al.
patent: 4616857 (1986-10-01), Woodman et al.
patent: 4699292 (1987-10-01), Farrell

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