Reticle-carrying container

Details Reticle-carrying container Reticle-carrying container

2005-12-05

2008-09-02

Kim, Peter B (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C355S072000

Reexamination Certificate

active

07420655

ABSTRACT:
The present invention allows a reticle-carrying container11to be fastened in a reticle stocker2even if the reticle-carrying container11is wrongly oriented. The reticle-carrying container11includes an interior with an opening at one end for storing a reticle12, a door14for covering and blocking the opening, and a seal material15for sealing the interior hermetically when the door14closes the pod13. The reticle-carrying container11is provided with two sets of kinematic pin grooves61for positioning and fastening the reticle-carrying container11, which are turned180degrees from each other on the outer surface of the door14. Receiving parts22for receiving and holding the kinematic pin grooves61are arranged in the positions corresponding to the kinematic pin grooves61on the outer surface of the pod13so that the two sets of kinematic pin grooves61can be engaged with the pins in both orientations.

REFERENCES:
patent: 6216873 (2001-04-01), Fosnight et al.
patent: 2003/0074097 (2003-04-01), Emerson et al.
patent: 2003/0227605 (2003-12-01), del Puerto et al.
patent: 2006/0076264 (2006-04-01), CletusWittman
patent: 1 022 615 (2000-07-01), None
patent: 1 662 324 (2006-05-01), None
patent: A-10-163094 (1998-06-01), None

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