Reticle carrier including reticle positioning and location...

Details Reticle carrier including reticle positioning and location... Reticle carrier including reticle positioning and location...

2006-11-21

2006-11-21

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C355S076000, C355S072000

Reexamination Certificate

active

07139066

ABSTRACT:
A carrier for a reticle used in photolithographic semiconductor processing, having a base portion and a cover portion. The base portion has a plurality of reticle supports and a plurality of reticle positioning members. The cover portion is adapted to sealingly mate with the base portion, and has an inner surface with a plurality of spaced apart reticle restraints and a pair of reticle positioning tabs projecting inwardly therefrom. Each reticle positioning tab has a diagonal edge portion, and is oriented so that the diagonal edge portion urges a reticle resting on the reticle supports into engagement with the reticle restraints when the cover portion is mated with the base portion.

REFERENCES:
patent: 6216873 (2001-04-01), Fosnight et al.
patent: 6825916 (2004-11-01), Wiseman et al.

Affiliated with

Also associated with

Rating

Reticle carrier including reticle positioning and location... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Reticle carrier including reticle positioning and location..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Reticle carrier including reticle positioning and location... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3648309