Reticle, apparatus for monitoring optical system, method for...

Details Reticle, apparatus for monitoring optical system, method for... Reticle, apparatus for monitoring optical system, method for...

2008-08-27

2010-10-12

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

Position or displacement

Position transverse to viewing axis

C356S603000

Reexamination Certificate

active

07812972

ABSTRACT:
A reticle has a mask substrate, a test pattern established on the mask substrate having an asymmetrical diffraction grating so as to generate positive first order diffracting light and negative first order diffracting light in different diffraction efficiencies, and a device pattern adjacent to the test pattern established on the mask substrate.

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