Reticle and method of manufacturing method the same

Details Reticle and method of manufacturing method the same Reticle and method of manufacturing method the same

2006-12-28

2009-12-08

Rosasco, Stephen (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

C428S014000

Reexamination Certificate

active

07629090

ABSTRACT:
A reticle and a method of producing the same are disclosed. The reticle includes a medium layer formed on a transparent substrate, chrome layer patterns spaced apart from each other at predetermined intervals on the medium layer, and a frame and a pellicle formed to enclose the resulting structure. The method of manufacturing a reticle includes the steps of forming a medium layer on a transparent substrate, forming chrome layers on the medium layer, patterning the chrome layers so that the chrome layers are spaced apart from each other at predetermined intervals, and attaching a frame and a pellicle to surround the result. The resolution and focus of light output from the reticle is improved.

REFERENCES:
patent: 6780548 (2004-08-01), Kalk
patent: 2003/0024274 (2003-02-01), Cho et al.
patent: 2006/0083997 (2006-04-01), Lin et al.
patent: 10-1996-0042202 (1996-12-01), None
patent: 1998-0003826 (1998-03-01), None
patent: 2001-0004926 (2001-01-01), None
patent: 2006-0078472 (2006-07-01), None

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